Document Type and Number:
Japanese Patent JPS4860887
Kind Code:
U
Application Number:
JP10621271U
Publication Date:
August 02, 1973
Filing Date:
November 12, 1971
Export Citation:
International Classes:
F23Q3/00; H01L41/00; H01L41/113; H02N2/00; H02N2/18; (IPC1-7): F23Q3/00; H01L41/00