Document Type and Number:
Japanese Patent JPS4911659
Kind Code:
Y1
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Application Number:
JP14728272U
Publication Date:
March 20, 1974
Filing Date:
December 23, 1972
Export Citation:
International Classes:
H01L29/73; H01L21/331; H01L21/822; H01L27/06; (IPC1-7): H01L27/06