Document Type and Number:
Japanese Patent JPS4911661
Kind Code:
U
Application Number:
JP5272972U
Publication Date:
January 31, 1974
Filing Date:
May 08, 1972
Export Citation:
International Classes:
H01L21/52; H01L21/60; H01L23/48; H01L23/50; (IPC1-7): H01L23/48