- Patent JPS4952967

Document Type and Number:

Japanese Patent JPS4952967

Kind Code:

A

Application Number:

JP9512972A

Publication Date:

May 23, 1974

Filing Date:

September 25, 1972

Export Citation:

International Classes:

H01L29/73; H01L21/225; H01L21/331

Other References:

IBM TECHNICAL DISCLOSURE BULLETIN#V14#N6=1971
IBM TECHNICAL DISCLOSURE BULLETIN#V14#N1=1971

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