Document Type and Number:
Japanese Patent JPS4955282
Kind Code:
A
Application Number:
JP9710872A
Publication Date:
May 29, 1974
Filing Date:
September 29, 1972
Export Citation:
International Classes:
H01L27/08; H01L21/312; H01L21/82; H01L29/78; (IPC1-7): H01L21/312