Document Type and Number:
Japanese Patent JPS4964378
Kind Code:
A
Application Number:
JP10547672A
Publication Date:
June 21, 1974
Filing Date:
October 20, 1972
Export Citation:
International Classes:
H01L25/07; H01L29/861
Domestic Patent References:
| JPS4723176A |
Foreign References:
| US3015762A | 1962-01-02 |