Document Type and Number:
Japanese Patent JPS4974964
Kind Code:
U
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Application Number:
JP11988872U
Publication Date:
June 28, 1974
Filing Date:
October 17, 1972
Export Citation:
International Classes:
F23Q3/00; H01L41/00; H01L41/113; H02N2/00; H02N2/18; (IPC1-7): F23Q3/00; H01L41/00