Document Type and Number:
Japanese Patent JPS4982665
Kind Code:
U
Application Number:
JP12740772U
Publication Date:
July 17, 1974
Filing Date:
November 02, 1972
Export Citation:
International Classes:
H05K13/04; B23D15/00; B23D15/12; B26D1/06; H01L21/50; H01L23/00; (IPC1-7): H01L23/00; B23D15/12