Document Type and Number:
Japanese Patent JPS50108889
Kind Code:
A
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Application Number:
JP1387774A
Publication Date:
August 27, 1975
Filing Date:
February 01, 1974
Export Citation:
International Classes:
H01L29/43; H01L21/28; H01L29/864
Domestic Patent References:
| JPS4841671A | 1973-06-18 |