Document Type and Number:
Japanese Patent JPS50120627
Kind Code:
A
Application Number:
JP2138375A
Publication Date:
September 22, 1975
Filing Date:
February 20, 1975
Export Citation:
International Classes:
G03F7/30; G03F7/32; H05K3/06; (IPC1-7): G03F5/24; G03F7/08; H05K3/06