Document Type and Number:
Japanese Patent JPS5026912
Kind Code:
B1
Abstract:
A method of manufacturing charge coupled devices having first and second groups of interdigitated control electrodes insulated from one another.
Application Number:
JP10061671A
Publication Date:
September 04, 1975
Filing Date:
December 10, 1971
Export Citation:
International Classes:
H01L21/8234; H01L29/49; H01L29/768; (IPC1-7): H01L29/78