Document Type and Number:
Japanese Patent JPS5033090
Kind Code:
Y1
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Application Number:
JP4211669U
Publication Date:
September 26, 1975
Filing Date:
May 08, 1969
Export Citation:
International Classes:
H01L21/60; H01L21/603; (IPC1-7): H01L21/603
Domestic Patent References:
| JPS4035323Y1 |