Document Type and Number:
Japanese Patent JPS51127255
Kind Code:
U
Application Number:
JP4894475U
Publication Date:
October 14, 1976
Filing Date:
April 10, 1975
Export Citation:
International Classes:
C30B19/06; H01L21/208; H01L21/368; (IPC1-7): H01L21/208; B01J17/20; H01L21/368