Document Type and Number:
Japanese Patent JPS5114262
Kind Code:
A
Inventors:
SAITO TADASHI
MINAGAWA SHIGEKAZU
MINAGAWA SHIGEKAZU
Application Number:
JP8516274A
Publication Date:
February 04, 1976
Filing Date:
July 26, 1974
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01L21/205; (IPC1-7): H01L21/205