Document Type and Number:
Japanese Patent JPS51144575
Kind Code:
U
Application Number:
JP6104175U
Publication Date:
November 20, 1976
Filing Date:
May 08, 1975
Export Citation:
International Classes:
D03D15/02; D03D15/00; D03D25/00; (IPC1-7): D03D25/00; D03D15/00
Domestic Patent References:
| JPS5041968A | 1975-04-16 | |||
| JPS4714418A | ||||
| JP50050977B |
Previous Patent: METHOD OF GROWING SILICON CRYSTAL BY PULLING UP
Next Patent: MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
Next Patent: MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE