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Patent Searching and Data


Document Type and Number:
Japanese Patent JPS5117379
Kind Code:
B2
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Application Number:
JP10189971A
Publication Date:
June 02, 1976
Filing Date:
December 17, 1971
Export Citation:
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International Classes:
C30B19/00; C30B19/12; H01L21/208; H01L33/30



 
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