Document Type and Number:
Japanese Patent JPS5122373
Kind Code:
A
Abstract:
There is disclosed a device for plasma etching which includes a quartz cylinder surrounded by a coil of electrodes connected to a source of radio frequency energy, and having within it a concentric cylinder or perforated aluminum or other electrically conductive metal.
Inventors:
RICHAADO ERU BAASHIN
MITSUCHERU JEI SHINGURUTON
MITSUCHERU JEI SHINGURUTON
Application Number:
JP830375A
Publication Date:
February 23, 1976
Filing Date:
January 18, 1975
Export Citation:
Assignee:
INT PURAZUMA CORP
International Classes:
H01L21/302; H01J37/32; H01J65/04; H01L21/3065; H05H1/46
Domestic Patent References:
| JPS5144566A | 1976-04-16 |