Document Type and Number:
Japanese Patent JPS5132578
Kind Code:
U
Application Number:
JP7221475U
Publication Date:
March 10, 1976
Filing Date:
May 30, 1975
Export Citation:
International Classes:
G01J1/44; G06G7/24; (IPC1-7): G01J1/44; H01L31/00
Domestic Patent References:
| JPS4116957Y1 |
Foreign References:
| US3316409A | 1967-04-25 |
Previous Patent: 77 * 22 CHIKANFUENIRUGURISHINAMIDO * 33 MECHIRU 33 SEFUEMU 44 KARUBONSANJUDOTAI NO SEIZOHO
Next Patent: JPS5132579
Next Patent: JPS5132579