Document Type and Number:
Japanese Patent JPS5134316
Kind Code:
Y1
Application Number:
JP14836175U
Publication Date:
August 24, 1976
Filing Date:
October 29, 1975
Export Citation:
International Classes:
H01J37/22; G01D9/00; G01N23/225; H01J37/26; (IPC1-7): G01N23/225; G01D9/00; H01J37/26