Document Type and Number:
Japanese Patent JPS5134701
Kind Code:
Y2
Application Number:
JP4905972U
Publication Date:
August 27, 1976
Filing Date:
April 25, 1972
Export Citation:
International Classes:
G03B7/099; G01J1/00; G01J1/02; G02B7/00; H01L31/02; H01L31/0232; (IPC1-7): H01L31/02; G02B7/00