Document Type and Number:
Japanese Patent JPS5138971
Kind Code:
A
Inventors:
YASUDA YASUMICHI
TANAKA TOMOYUKI
TANAKA TOMOYUKI
Application Number:
JP11150474A
Publication Date:
March 31, 1976
Filing Date:
September 30, 1974
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01L29/73; H01L21/331; H01L21/52; H01L23/12; H01L29/08; (IPC1-7): H01L23/12; H01L29/08