Document Type and Number:
Japanese Patent JPS5139078
Kind Code:
B1
Application Number:
JP1552869A
Publication Date:
October 26, 1976
Filing Date:
February 28, 1969
Export Citation:
International Classes:
H01L27/092; H01L21/331; H01L21/8238; H01L27/04; H01L29/04; H01L29/73; H01L29/78; (IPC1-7): H01L29/04; H01L27/04; H01L29/78