Document Type and Number:
Japanese Patent JPS5158867
Kind Code:
A
Inventors:
IWABUCHI TOSHUKI
HIROSE YOSHUKI
HIROSE YOSHUKI
Application Number:
JP13280974A
Publication Date:
May 22, 1976
Filing Date:
November 20, 1974
Export Citation:
Assignee:
OKI ELECTRIC IND CO LTD
International Classes:
H01L21/60; H01L21/28; H01L23/12; (IPC1-7): H01L21/28; H01L21/60; H01L23/12