Document Type and Number:
Japanese Patent JPS5243968
Kind Code:
Y2
Application Number:
JP7036871U
Publication Date:
October 05, 1977
Filing Date:
August 06, 1971
Export Citation:
International Classes:
H03H5/02; H01L21/822; H01L27/04; H03H1/00; H04B1/06; (IPC1-7): H01L27/04; H03H1/00; H04B1/06