Document Type and Number:
Japanese Patent JPS5255989
Kind Code:
Y2
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Application Number:
JP9354071U
Publication Date:
December 17, 1977
Filing Date:
October 11, 1971
Export Citation:
International Classes:
F23Q3/00; H01L41/00; (IPC1-7): H01L41/00; F23Q3/00
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