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Patent Searching and Data


Document Type and Number:
Japanese Patent JPS5328769
Kind Code:
U
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JP2982720INDUSTRIAL APPLICABILITY: A particle monitor device and a dust-free process device including the particle monitor device.
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Application Number:
JP11108476U
Publication Date:
March 11, 1978
Filing Date:
August 18, 1976
Export Citation:
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International Classes:
G01N21/49; (IPC1-7): G01N21/02; G01N21/26
Domestic Patent References:
JPS5020780A1975-03-05
JPS465200A



 
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