Document Type and Number:
Japanese Patent JPS546871
Kind Code:
U
Application Number:
JP7887677U
Publication Date:
January 17, 1979
Filing Date:
June 16, 1977
Export Citation:
International Classes:
H01L29/08; H01L21/331; H01L29/41; H01L29/72; H01L29/73; (IPC1-7): H01L29/44; H01L29/08; H01L29/72
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