Document Type and Number:
Japanese Patent JPS5487068
Kind Code:
U
Application Number:
JP16110077U
Publication Date:
June 20, 1979
Filing Date:
December 01, 1977
Export Citation:
International Classes:
H01L21/027; G02F1/29; H01L21/26; H01L21/30; (IPC1-7): H01L21/26; G02F1/29
Domestic Patent References:
JPS4964097A | 1974-06-21 |