Document Type and Number:
Japanese Patent JPS5524697
Kind Code:
B2
Application Number:
JP14851175A
Publication Date:
July 01, 1980
Filing Date:
December 15, 1975
Export Citation:
International Classes:
H01L27/06; H01L21/28; H01L21/331; H01L21/8222; H01L29/47; H01L29/73; H01L29/872
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