Document Type and Number:
Japanese Patent JPS5529244
Kind Code:
Y2
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Application Number:
JP12955275U
Publication Date:
July 11, 1980
Filing Date:
September 20, 1975
Export Citation:
International Classes:
H01L29/73; H01L21/331; H01L29/06; H01L29/72; H01L29/74; H01L29/86; (IPC1-7): H01L29/06; H01L29/72; H01L29/86