Document Type and Number:
Japanese Patent JPS5540765
Kind Code:
Y2
Application Number:
JP3994176U
Publication Date:
September 24, 1980
Filing Date:
March 31, 1976
Export Citation:
International Classes:
H01L21/52; H01L23/04; H01L23/48; H01L29/74; (IPC1-7): H01L23/04; H01L23/48