Document Type and Number:
Japanese Patent JPS5547381
Kind Code:
B2
Application Number:
JP10543773A
Publication Date:
November 29, 1980
Filing Date:
September 20, 1973
Export Citation:
International Classes:
H05K3/00; B41C1/00; G03F1/00; G03F1/54; H01L21/027; H01L21/46