Document Type and Number:
Japanese Patent JPS5567166
Kind Code:
U
Application Number:
JP14818178U
Publication Date:
May 09, 1980
Filing Date:
October 30, 1978
Export Citation:
International Classes:
C23C14/36; C23C14/35; (IPC1-7): C23C15/00
Domestic Patent References:
| JPS5337588A | 1978-04-06 | |||
| JPS5347384A | 1978-04-27 |
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