Document Type and Number:
Japanese Patent JPS5626994
Kind Code:
B2
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Application Number:
JP10197073A
Publication Date:
June 22, 1981
Filing Date:
September 10, 1973
Export Citation:
International Classes:
C04B35/49; B23D63/00; C04B35/491; H01B3/12; H01L41/187; H01L41/39