Document Type and Number:
Japanese Patent JPS5632775
Kind Code:
Y2
Application Number:
JP8234175U
Publication Date:
August 04, 1981
Filing Date:
June 16, 1975
Export Citation:
International Classes:
H01J7/24; F28D9/00; H01L23/34; H01L23/36; H01L23/467; (IPC1-7): F28D9/00; H01J7/24; H01L23/34