Document Type and Number:
Japanese Patent JPS5651317
Kind Code:
Y2
Application Number:
JP17511476U
Publication Date:
December 01, 1981
Filing Date:
December 28, 1976
Export Citation:
International Classes:
C30B25/14; C23C16/44; C23C16/455; H01L21/205; H01L21/31; (IPC1-7): H01L21/205; H01L21/31