Document Type and Number:
Japanese Patent JPS57100131
Kind Code:
U
Application Number:
JP17741480U
Publication Date:
June 19, 1982
Filing Date:
December 10, 1980
Export Citation:
International Classes:
F24F7/007; F24F7/013; H01L31/00; H01L31/04; (IPC1-7): F24F7/013; H01L31/00
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