Document Type and Number:
Japanese Patent JPS57161249
Kind Code:
U
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Application Number:
JP4528281U
Publication Date:
October 09, 1982
Filing Date:
April 01, 1981
Export Citation:
International Classes:
H01L23/32; H01L23/34; H01L23/40; (IPC1-7): H01L23/32; H01L23/34