Document Type and Number:
Japanese Patent JPS5731845
Kind Code:
U
Application Number:
JP10745880U
Publication Date:
February 19, 1982
Filing Date:
July 28, 1980
Export Citation:
International Classes:
H05K3/46; H01L21/60; H05K1/11; (IPC1-7): H01L21/60; H05K1/11; H05K3/46