Document Type and Number:
Japanese Patent JPS5733778
Kind Code:
B2
Application Number:
JP14784174A
Publication Date:
July 19, 1982
Filing Date:
December 23, 1974
Export Citation:
International Classes:
H01L21/027; C08L33/00; C08L33/02; C08L33/04; C08L33/12; G03C1/72; G03F7/039; G03G17/00