Document Type and Number:
Japanese Patent JPS5759543
Kind Code:
B2
Inventors:
YAMAZAKI TERUHIKO
Application Number:
JP6165274A
Publication Date:
December 15, 1982
Filing Date:
May 30, 1974
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
H01L21/027; G03C1/765; G03F1/00; G03F1/60; G03F1/68; G03F9/00; H05K3/00
Previous Patent: 光反応性ノルボルネン系共重合体、その製造方法及びそれを含む配向膜
Next Patent: ADSORBING TYPE ARTIFICIAL ORGAN AND PRETREATMENT THEREOF
Next Patent: ADSORBING TYPE ARTIFICIAL ORGAN AND PRETREATMENT THEREOF