Document Type and Number:
Japanese Patent JPS5791592
Kind Code:
U
Application Number:
JP16762280U
Publication Date:
June 05, 1982
Filing Date:
November 25, 1980
Export Citation:
International Classes:
B23Q37/00; B25J5/02; B25J9/00; B25J19/00; H01L31/12; (IPC1-7): B25J5/02; B23Q37/00; B25J9/00; H01L31/12
Domestic Patent References:
| JPS5327954A | 1978-03-15 |