Title:
【発明の名称】プラズマエツチングしたアルミニウム膜のエツチング処理後の侵食を防止するプラズマパツシベ-シヨン技術
Document Type and Number:
Japanese Patent JPS5812343
Kind Code:
B2
Abstract:
A method for preventing the post-etch corrosion of aluminum or aluminum alloy film which has been etched utilizing chlorinated plasma wherein the etched film is exposed to fluorinated plasma.
Inventors:
KURISUTOFUAA EICHI GARUFUO
ASHOKU ERU NARAMUWAA
ASHOKU ERU NARAMUWAA
Application Number:
JP11722081A
Publication Date:
March 08, 1983
Filing Date:
July 28, 1981
Export Citation:
Assignee:
FUEACHAIRUDO KAMERA ENDO INSUTSURUMENTO CORP
International Classes:
C23F4/00; C23F11/00; H01L21/02; H01L21/302; H01L21/3065; H01L21/3213; (IPC1-7): C23F1/00
Attorney, Agent or Firm:
Kazuo Kobashi