Title:
MANUFACTURE OF SOLAR CELL
Document Type and Number:
Japanese Patent JPS5823486
Kind Code:
A
Abstract:
PURPOSE:To manufacture the solar cell with the antireflection film of amorphous tantalum pentoxide at extremely low cost by coating the surface of one conduction type semiconductor having a PN juntion with organic matter, the principal ingredient thereof is tantalum-alkoxide[Ta(OR)s], and thermally treating the surface. CONSTITUTION:A P type silicon single crystal is introduced into a diffusion furnace, and an N<+> region and an N<+>P junction surface 3 are formed through the thermal diffusion of phosphorus as an impurity or ion injection. Latticed surface electrodes 4 and a ack electrode 5 are shaped. The solar cell 8 to which said treatment is completed is dipped into an organic solution 7. As the solution 7, tantalum-chelate[ Ta( OH )2( OCHRCOOH)3 ]and tantalum-acrylate[ Ta ( OR )3 (OCO)2]of 5% are contained besides tantalum-alkoxide[Ta(OR)5]as a solute, and the mixed liquid of a ethanol (C2H5OH) and ethyl acetate (CH3COOC2H5) is used as a solvent. One selected from a dipping method, a rotary application method and a spray method may be as a process applying the organic matter.
Inventors:
NAKANO HIROTAKA
Application Number:
JP12141781A
Publication Date:
February 12, 1983
Filing Date:
August 04, 1981
Export Citation:
Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
H01L31/04; H01L31/0216; (IPC1-7): H01L31/04
Attorney, Agent or Firm:
Noriyuki Noriyuki
Previous Patent: ２つの膨張部材の間に直接配置された熱交換器を含む空調ループ
Next Patent: MANUFACTURE OF POLYCRYSTAL SILICON SOLAR CELL
Next Patent: MANUFACTURE OF POLYCRYSTAL SILICON SOLAR CELL