Title:
【考案の名称】圧電薄膜形電気-機械的変位変換素子
Document Type and Number:
Japanese Patent JPS5837159
Kind Code:
U
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Inventors:
Katsuhiro Kinoshita
Mitsutaka Kato
Mitsutaka Kato
Application Number:
JP13178281U
Publication Date:
March 10, 1983
Filing Date:
September 03, 1981
Export Citation:
International Classes:
H01H57/00; B06B1/06; H01L41/09; H02N2/00; (IPC1-7): H01L41/00; B06B1/06; H01H57/00; H01L41/00; B06B1/06; H01H57/00
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