Title:
CONTROL DEVICE FOR ELECTRON BEAM IMAGE DRAWING
Document Type and Number:
Japanese Patent JPS5857726
Kind Code:
A
Abstract:
PURPOSE:To perform pattern reading at a high speed by a method wherein dot pattern conversion parts are provided in a plurality, each dot pattern data obtained by specifying the parts alternately and making calculate is stored for each cell memory, and then it is read out in stored orders resulting in read-out at a control unit. CONSTITUTION:The output of a controller 101 with the main memory (a) is transmitted to a control bus 104 via an interface, and dot conversion parts DCVT1 and DCVT2 are connected to this bus 104. These conversion parts are constituted respectively of pre-processing units PPU1 and PPU2, function generating parts FG1 and FG2 and write control units WCU1 and WCU2, and a read control unit 105 is connected to the bus 104. Further, a high speed data transfer part 103 is connected to the controller 101, and the output thereof is connected to conversion parts via a CPU-bus and connected to a data memory having memories DM1 and DM2. Beside, a plurality cell memory groups M1- M7 are connected to two conversion parts and the read control unit 105 via an RCU-bus and a WCU-bus.
Inventors:
TOKITA MASAKAZU
Application Number:
JP15664181A
Publication Date:
April 06, 1983
Filing Date:
October 01, 1981
Export Citation:
Assignee:
TOSHIBA MACHINE CO LTD
International Classes:
H01L21/027; H01L21/30; (IPC1-7): H01L21/30
Domestic Patent References:
| JPS559433A | 1980-01-23 |