Title:
【考案の名称】半導体装置
Document Type and Number:
Japanese Patent JPS59111050
Kind Code:
U
More Like This:
Inventors:
Toshio Ogawa
Yukio Igarashi
Shizuya Numata
Yukio Igarashi
Shizuya Numata
Application Number:
JP484583U
Publication Date:
July 26, 1984
Filing Date:
January 19, 1983
Export Citation:
International Classes:
H01L23/04; H01L21/58; H01L21/60; H01L23/48; (IPC1-7): H01L23/48; H01L21/58; H01L23/04
Previous Patent: JPS59111049
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