Title:
【発明の名称】ハンドウタイソウチノセイゾウホウホウ
Document Type and Number:
Japanese Patent JPS5918860
Kind Code:
B2
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Inventors:
FUJII EIZO
KURODA HIROSHI
KURODA HIROSHI
Application Number:
JP13536275A
Publication Date:
May 01, 1984
Filing Date:
November 10, 1975
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
H01L21/3205; H01L21/28; H01L21/302; H01L21/306; (IPC1-7): H01L21/306
Attorney, Agent or Firm:
Toshio Nakao