Title:
【考案の名称】半導体変位変換器
Document Type and Number:
Japanese Patent JPS5926608
Kind Code:
Y2
Inventors:
Kurihara Yasutoshi
Kazuaki Hachino
Satoshi Shimada
Nishihara Motohisa
Kazuaki Hachino
Satoshi Shimada
Nishihara Motohisa
Application Number:
JP7051478U
Publication Date:
August 02, 1984
Filing Date:
May 26, 1978
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
H01L29/84; G01L9/04; (IPC1-7): H01L29/84; G01L9/04
Attorney, Agent or Firm:
Akio Takahashi