Title:
DEFECT INSPECTOR
Document Type and Number:
Japanese Patent JPS596535
Kind Code:
A
Abstract:
PURPOSE:To enable a comparison inspection of two chips even when two chips only are juxtaposed to each other by a method wherein inspection lights are made to irradiate on mutually adjoining two patterns using reflection optical systems of two groups while avoiding to generate mutual mechanical interference. CONSTITUTION:Respective inspection lights 5 transmits lenses 15, 16 to be reflected in order by convex mirrors 11, 12 and concave mirros 13, 14, and are injected to the mutually adjoining two chips on a mask 9. Injected lights transmit only on the outside of the shading patterns, and are projected to be received to sensors 3, 4 through objective lenses 17, 18. The sensors 3, 4 apply detected signals to a comparator 10 through amplifiers 7, 8, and the comparator 10 compares both the signals to discriminate the differential signal thereof as a defect. According to this method, because inspection lights can be irradiated respectively to the mutually adjoining two chips on the mask, even when the two chips A, B only are juxtaposed to each other, the comparison inspection of the two chips can be performed, and workability is enhanced.
Inventors:
NARAOKA KIYOTAKE
TANABE YOSHIKAZU
TANABE YOSHIKAZU
Application Number:
JP11542482A
Publication Date:
January 13, 1984
Filing Date:
July 05, 1982
Export Citation:
Assignee:
HITACHI LTD
International Classes:
G01N21/88; G01N21/93; G01N21/956; G03F1/84; H01L21/027; H01L21/66; (IPC1-7): H01L21/66
Attorney, Agent or Firm:
Toshiyuki Usuda
Next Patent: JPS596536